Ruzic elected as SPIE Senior Member
Prof. David N. Ruzic has been elected to the grade of Senior Member in the International Society for Optics and Photonics (SPIE).
Serving more than 264,000 constituents internationally, SPIE’s mission is to advance emerging, light-based technologies through information exchange, continuing education, publications, patent precedent, and career and professional growth.
Ruzic’s connection to SPIE has been through his research and development of EUV lithography. He has been an invited speaker at the organization’s conference on Advanced Lithography since the conferences’ creation. He and his students have published extensively in SPIE-related journals and conference proceedings.
A member of the Nuclear, Plasma, and Radiological Engineering faculty the past 34 years, Ruzic has studied EUV lithography as part of the work of the Center for Plasma-Material Interactions, which he directs on the University of Illinois at Urbana-Champaign campus. Ruzic’s interests also include plasma-material interactions, liquid metals for fusion, etching and deposition for plasma processing, atmospheric-pressure plasmas for cleaning, adhesion, and film deposition; and magnetron sputtering applications.
In addition to his membership in SPIE, Ruzic also is a Fellow of the American Nuclear Society (ANS), the American Vacuum Society (AVS), and the American Physical Society (APS).
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